Method and system for determining semiconductor characteristics

ABSTRACT

Method and system for determining semiconductor characteristics. In a specific embodiment, the present invention provides a method for determining one or more characteristics of a partially processed integrated circuit. The method includes a step for providing a substrate material. The method further includes a step for forming at least one opening within the substrate material. The opening can be characterized by an opening characteristic that includes a depth and an opening width associated with an unknown volume. The method includes a step for providing fill material. Additionally, the method includes a step for processing the fill material to cause a first portion of the fill material to enter the opening and occupy an entirety of the unknown volume associated with the opening characteristic while a second portion of the fill material remains outside of the unknown volume. Moreover, the method includes a step for processing the second portion of the fill material using one or more processes to determine a spatial characteristic associated with the unknown volume.

CROSS-REFERENCES TO RELATED APPLICATIONS

This application claims priority to Chinese Patent Application No.200610029292.7 (SMIC Docket No. 1-06-213) filed on Jul. 21, 2006,commonly assigned and hereby incorporated by reference for all purposes.

BACKGROUND OF THE INVENTION

The present invention is directed to integrated circuits and theirprocessing for the manufacture of semiconductor devices. In particular,the invention provides a method and device for monitoring various stepsduring the manufacturing of integrated circuits. Merely by way ofexample, the invention has been applied to measuring characteristics,such as dimensions, associated with trenching, etching, and/or growthprocess of a partially processed semiconductor for the manufacture ofintegrated circuits. More particularly, the invention provides a methodfor manufacturing integrated circuits using a monitoring technique fordetermining spatial dimensions of features, including trenches, andother features and the like. But it would be recognized that theinvention has a much broader range of applicability. For example, anembodiment of the present invention provides a method for method formeasuring capacitance of a partially processed integrated circuit.

Integrated circuits or “ICs” have evolved from a handful ofinterconnected devices fabricated on a single chip of silicon tomillions of devices. Current ICs provide performance and complexity farbeyond what was originally imagined. In order to achieve improvements incomplexity and circuit density (i.e., the number of devices capable ofbeing packed onto a given chip area), the size of the smallest devicefeature, also known as the device “geometry”, has become smaller witheach generation of ICs. Semiconductor devices are now being fabricatedwith features less than a quarter of a micron across.

Increasing circuit density has not only improved the complexity andperformance of ICs but has also provided lower cost parts to theconsumer. An IC fabrication facility can cost hundreds of millions, oreven billions, of dollars. Each fabrication facility will have a certainthroughput of wafers, and each wafer will have a certain number of ICson it. Therefore, by making the individual devices of an IC smaller,more devices may be fabricated on each wafer, thus increasing the outputof the fabrication facility. Making devices smaller is very challenging,as each process used in IC fabrication has a limit. That is to say, agiven process typically only works down to a certain feature size, andthen either the process or the device layout needs to be changed. Anexample of such a limit is the conventional method used to measurevarious characteristics of partially process integrated circuits.

Fabrication of custom integrated circuits using chip foundry serviceshas evolved over the years. Fabless chip companies often design thecustom integrated circuits. Such custom integrated circuits require aset of custom masks commonly called “reticles” to be manufactured. Achip foundry company called Semiconductor International ManufacturingCompany (SMIC) of Shanghai, China is an example of a chip company thatperforms foundry services. Although fabless chip companies and foundryservices have increased through the years, many limitations still exist.

As an example, it is often desirable to measure various characteristics(such as, trench dimensions, electrical properties, etc.) of partiallyprocessed ICs during the manufacturing process. For example, dimensionsof deep trenches (e.g., deep trenches for manufacturing of capacitors)are often a critical aspect of IC. Various conventional techniques, suchas measuring IC characteristics by dissecting partially processed ICsand examining the dissected ICs. Unfortunately, conventional techniquesare often adequate. That is, conventional techniques are oftencumbersome, requires manual cutting processes, and is not efficient,which leads to higher costs and other undesirable characteristics. Theseand other limitations can be found throughout the present specificationand more particularly below.

Therefore, an improved technique for processing semiconductor devices isdesired.

BRIEF SUMMARY OF THE INVENTION

The present invention is directed to integrated circuits and theirprocessing for the manufacture of semiconductor devices. In particular,the invention provides a method and device for monitoring various stepsduring the manufacturing of integrated circuits. Merely by way ofexample, the invention has been applied to measuring characteristics,such as dimensions, associated with trenching, etching, and/or growthprocess of a partially processed semiconductor for the manufacture ofintegrated circuits. More particularly, the invention provides a methodfor manufacturing integrated circuits using a monitoring technique fordetermining spatial dimensions of features, including trenches, andother features and the like. But it would be recognized that theinvention has a much broader range of applicability. For example, anembodiment of the present invention provides a method for method formeasuring capacitance of a partially processed integrated circuit.

In a specific embodiment, the present invention provides a method fordetermining one or more characteristics of a partially processedintegrated circuit. The method includes a step for providing a substratematerial. For example, the substrate material can characterized by asubstrate thickness and a substrate diameter. The method furtherincludes a step for forming at least one opening (e.g., deep trench,etc) within the substrate material. The opening can be characterized byat least an opening characteristic. The opening characteristic includesa depth within a portion of the substrate thickness and an openingwidth. The depth and width are associated with an unknown volume. Themethod additionally includes a step for providing a predetermined amountof fill material. For example, a known amount of polymer material isprovided. Additionally, the method includes a step for processing thefill material to cause a first portion of the fill material to enter theopening (e.g., by melting the polymer material and causing it to flowinto the opening) and occupy an entirety of the unknown volumeassociated with the opening characteristic while a second portion of thefill material remains outside of the unknown volume associated with theopening characteristic. Moreover, the method includes a step forprocessing the second portion of the fill material using one or moreprocesses to determine a spatial characteristic associated with theunknown volume.

In another specific embodiment, the invention provides a method fordetermining one or more characteristics of a partially processedintegrated circuit. The method includes a step for providing a substratematerial. For example, the substrate material is characterized by afirst plurality of dimensions (e.g., size, thickness, etc.). The methodalso includes a step for forming one or more openings on the substratematerial. For example, the one or more opening is characterized by atleast an opening characteristic (e.g., depth, aspect ratio, size, etc).The method additionally includes a step for providing a fillingmaterial. The filling material is consisted of a first portion and asecond portion. The first portion is positioned within the one or moreopening. The second portion is overlaying the one or more openings. Themethod also includes a step for determining at least a fillingcharacteristic (e.g., amount of filling material being filled into theopenings, ashing time for removing a predetermined amount fillingmaterial, etc.) of the filing material. Additionally, the methodincludes a step for determining the opening characteristic. The openingcharacteristic is associated with the filling characteristic.

According to another specific embodiment, the present invention providesa method for determining one or more characteristics of a partiallyprocessed integrated circuit. The method includes a step for providing asubstrate material. For example, the substrate material is characterizedby a first plurality of dimensions. The method additionally includes astep for forming one or more openings on the substrate material. Forexample, the one or more opening is characterized by at least an openingcharacteristic. Additionally, the method includes a step for providing apolymer material (e.g., photoresist material, etc.). The polymermaterial is overlaying the one or more openings. For example, thepolymer material is characterized by a predetermined amount (e.g.,volume, size, etc.). The method also includes a step for subjecting thepolymer material to a predetermined condition (e.g., a hard bakeprocess, high temperature, etc.). The polymer material becomes a fluidpolymer material after being subjected to the predetermined condition.The fluid polymer material is consisted of a first portion and a secondportion. The first portion is positioned within the one or moreopenings. The second portion is overlaying the one or more openings. Themethod additionally includes a step for determining one or more fillingcharacteristics of the fluid polymer material. The method furtherincludes a step for determining the opening characteristic. The openingcharacteristic is associated with the one or more fillingcharacteristics.

According to yet another specific embodiment, the present inventionprovides a method for manufacturing integrated circuits. The methodincludes a step for providing a batch of semiconductor substrates formanufacturing integrated circuits. The method also includes a step forforming one or more openings on each of the substrates. For example,each of the openings is characterized by a depth and an aspect ratio.The method additionally includes a step for providing a filling materialfor each of the substrates. The filling material is consisting of afilling portion and a covering portion. The filling portion ispositioned within the one or more openings on each of the substrate. Thecovering portion is overlaying the one or more openings on each of thesubstrate. The method additionally includes determining a fillingcharacteristic for each of the substrates. The filling characteristic isassociated with a size of the filling portion. The method also includesa step for determining an opening characteristic for each of thesubstrates based on the filling characteristics. The openingcharacteristic is associated with the depth and aspect ratio. The methodadditionally includes a step for processing each of the substrates.Moreover, the method includes a step for providing fully processedintegrated circuits using each of the substrates. As defined herein, theterm “substrate” or “substrates” can be interpreted by a meaningconsistent with one of ordinary skill in the art. That is, the termsubstrate can include bulk substrates, multi-layered substrates (e.g.,silicon wafer with overlying dielectric and metal films), gradedsubstrates, silicon on insulator substrates, epitaxial siliconsubstrates, any combination of these, including layered substrates,partially processed wafers (including portions of integrated circuitsand other elements), patterned and unpatterned wafers, and the like. Ofcourse, there can be other variations, modifications, and alternatives.

Many benefits are achieved by way of the present invention overconventional techniques. For example, the present technique provides aneasy to use process that relies upon conventional technology. In someembodiments, the method provides a method for measuring variouscharacteristics of a partially processed IC without destroying the ICduring the process. For example, various dimensional and electricallyproperties of deep trenches can be measured for every wafer during themanufacturing process. According to various embodiments, the presentinvention reduces manufacturing costs, enhances reliability, andimproves consistency of ICs. Additionally, the method provides a processthat is compatible with conventional process technology withoutsubstantial modifications to conventional equipment and processes.Depending upon the embodiment, one or more of these benefits may beachieved. These and other benefits will be described in more throughoutthe present specification and more particularly below.

Various additional objects, features and advantages of the presentinvention can be more fully appreciated with reference to the detaileddescription and accompanying drawings that follow.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a simplified diagram illustrating vertical dissections ofsemiconductor wafers.

FIG. 2 is a simplified diagram illustrating vertical sections ofsemiconductor wafers.

FIG. 3 is a simplified diagram illustrating a cross section of apartially process wafer.

FIG. 3A is a simplified diagram illustrating a process for obtainingcross sections of a partially processed wafer material.

FIG. 4 is a simplified flow diagram illustrating a method fordetermining various characteristics of semiconductor wafers according toan embodiment of the present invention.

FIG. 5 is a simplified diagram illustrating openings formed on asubstrate material according an embodiment of the present invention.

FIG. 6 is a simplified diagram illustrating filling of openingsaccording to an embodiment of the present invention.

FIGS. 7A-7C are simplified diagrams illustrating profiles of fillingmaterials according to an embodiment of the present invention.

FIG. 8 is a simplified diagram of reference data according to anembodiment of the present invention.

FIG. 9 is another simplified diagram of reference data according to anembodiment of the present invention.

FIG. 10 is a simplified diagram illustrating a utility used according toan embodiment of the present invention.

FIG. 11 is a simplified flow diagram illustrating an embodiment of thepresent invention.

DETAILED DESCRIPTION OF THE INVENTION

The present invention is directed to integrated circuits and theirprocessing for the manufacture of semiconductor devices. In particular,the invention provides a method and device for monitoring various stepsduring the manufacturing of integrated circuits. Merely by way ofexample, the invention has been applied to measuring characteristics,such as dimensions, associated with trenching, etching, and/or growthprocess of a partially processed semiconductor for the manufacture ofintegrated circuits. More particularly, the invention provides a methodfor manufacturing integrated circuits using a monitoring technique fordetermining spatial dimensions of features, including trenches, andother features and the like. But it would be recognized that theinvention has a much broader range of applicability. For example, anembodiment of the present invention provides a method for method formeasuring capacitance of a partially processed integrated circuit.

As discussed above, various conventional techniques have been used tomonitor the manufacturing process and to measure various characteristics(e.g., size, dimension, capacitance, etc.). Typically, conventionaltechniques destroy wafers that are monitored and/or measured. Forexample, a conventional technique requires that a semiconductor wafer tobe dissected before various measurements and examination can beconducted.

FIG. 1 is a diagram illustrating vertical dissections of semiconductorwafers. As shown, a vertical dissection 100 illustrates the verticaldissection of normal (i.e., or desirable) trenches on a wafer. Avertical dissection 110 illustrates the vertical dissection of shrank(i.e., undesirable or even defective) trenches. Compared with trenchesshown in vertical dissection 100, trenches shown in the verticaldissection 110 have smaller sizes and the widths of trenches drasticallydecrease toward the deep end of trenches.

FIG. 2 is a diagram illustrating vertical sections of semiconductorwafers. As shown, a vertical dissection 200 illustrates the crosssection of normal (i.e., or desirable) trenches on a wafer. A verticaldissection 210 illustrates the cross section of bottom-short (i.e.,undesirable or even defective) trenches. Compared with trenches shown inthe vertical dissection 2100, trenches shown in the vertical dissection210 are shallower.

In addition to examining vertical dissections, cross sections can beused to measure various characteristics of wafers. FIG. 3 is a diagramillustrating a cross section of a partially process wafer. For example,a cross section 310 is obtained through chemical mechanical polishing(CMP) process. FIG. 3A is a diagram illustrating a process for obtainingcross sections of a partially processed wafer material. For example,cross sections at depth of two micrometers and five micrometers areobtained through CMP processes. Based on the sizes of opening at twodepths, various characteristic (e.g., depth, capacity, capacitance,etc.) can be measured.

By obtaining vertical dissection and/or cross sections of wafers andexamining the dissected wafers, conventional techniques provide toolsfor monitoring the manufacturing process. Unfortunately, theabovementioned conventional techniques are costly and inefficient. Forexample, conventional techniques destroy the subject wafer during theprocess. As a result, only selected—not all of—wafers are examined. Inaddition, the process of dissecting and examining wafers according tothe conventional technique often take hours.

Therefore, it is to be appreciated according to various embodiments, thepresent invention allows various characteristics of partially processedsemiconductor wafers to be measured without damaging the wafers.

FIG. 4 is a simplified flow diagram illustrating a method fordetermining various characteristics of semiconductor wafers according toan embodiment of the present invention. This diagram is merely anexample, which should not unduly limit the scope of the claims. One ofordinary skill in the art would recognize many variations, alternatives,and modifications. For example, various steps may be added, removed,moved, replaced, repeated, overlapped, and/or partially overlapped.

At step 401, a substrate material is provided. For example, thesubstrate material includes pure silicon material that is used for themanufacturing of semiconductor wafer. The semiconductor can becharacterized by various dimensions. According to a specific embodiment,the substrate material is in a circular shape characterized by adiameter of twelve inches. The substrate material can have otherdimensions as well.

At step 402, one or more openings are formed on the substrate material.Depending upon application, various techniques can be used to formopenings on the substrate material. According to a specific embodiment,etching process is performed to for opening. For example, plasma etchingis performed to form deep trenches on the substrate material. Accordingto another specific embodiment, openings are formed on the substratematerial by way of silicon growth.

FIG. 5 is a simplified diagram illustrating openings formed on asubstrate material according an embodiment of the present invention.This diagram is merely an example, which should not unduly limit thescope of the claims. One of ordinary skill in the art would recognizemany variations, alternatives, and modifications. As seen in FIG. 5, apartially processed semiconductor wafer 500 includes a number ofopenings. The openings have various physical and electricalcharacteristics, such as depth, size, capacity, spacing distance, aspectration, etc. For example, the openings are deep trenches with an aspectratio (i.e., depth v. width) of more than 10:1. As another example, theopenings are used to form capacitors, whose electrical characteristicsare related to physical dimensions of the openings.

Now referring back to FIG. 4. At step 403, filling materials areprovided and filled into the openings on the substrate. Depending uponapplications, various types of filing materials can be used. Forexample, fluid material and fluid-like materials (e.g., solid polymermaterial that exhibit fluid characteristics after being exposed to hightemperature) are used as filling material. According to a specificembodiment, liquid material (such as water) is used as a fillingmaterial. According to another specific embodiment, photoresist materialis used as a filling material. Other materials with fluid-like flowingcharacteristics can be used as well.

FIG. 6 is a simplified diagram illustrating filling of openingsaccording to an embodiment of the present invention. This diagram ismerely an example, which should not unduly limit the scope of theclaims. One of ordinary skill in the art would recognize manyvariations, alternatives, and modifications. As shown in FIG. 6, afterthe filling process, a partially processed wafer includes a partiallyprocess semiconductor wafer 620 and a filling material 610. The fillingmaterial 610 can be defined as two portions: a first portion 610 b thatis filled into the openings and a second portion 610 a that overlays theopenings. According to another embodiment, the filling material 610 doesnot includes a second portion that overlays the openings. There can beother variations as well.

Now referring back to FIG. 4. At step 404, various characteristics ofthe filling material are determined. According to a specific embodiment,the amount of filling material that are filled into the openings isdetermined. For example, a predetermined amount of filling material isfilled into the openings, and thickness of filling material overlayingthe openings (i.e., the portion of filling material that does not fillinto the openings) is used to determine the amount of filling materialthat is filled into the openings. For example, if two milliliters offilling material is filled into the openings and one milliliter offilling material is overlaying the openings, it can be determined thatone milliliter of filling material is filled into the openings.

According to another specific embodiment, filling characteristicsinclude a profile of the filling material. FIGS. 7A-7C are simplifieddiagrams illustrating profiles of filling materials according to anembodiment of the present invention. These diagrams merely provide anexample, which should not unduly limit the scope of the claims. One ofordinary skill in the art would recognize many variations, alternatives,and modifications. For essentially the same amount of filling material(e.g., photoresist material) used, a profile 700 in FIG. 7A illustratesa situation where the openings are small and most of the fillingmaterial remains on the top, a profile 730 in FIG. 7C illustrates asituation where the openings are large and almost all of the fillingmaterials are filled into the openings; and a profile 720 in FIG. 3Cillustrates a situation where the sizes of openings is between sizes ofopenings illustrated in FIG. 7A and FIG. 7C.

According to yet another specific embodiment, filling characteristicsincludes etching and/or recess time of the filling material. Forexample, longer recess time of filling material overlaying the openingsmeans the openings are small and most of the filling materials are notfilled into the openings, and vice versa. There can be other fillingcharacteristics as well.

Now referring back to FIG. 4. At step 405, various characteristics ofthe openings are determined. According to an embodiment, the size of theopenings is determined based on the amount of filling material filledinto the openings. According to another embodiment, the size of theopenings is determined based on the amount of filling materialoverlaying the openings. Depending upon application, the sizes and shapeof the openings can be determined based on a profile (e.g., shape) offilling material overlaying the openings. According yet another specificembodiment, various characteristics of the openings are determined bycomparing filling characteristic of a target wafer with reference data.For example, reference data includes previous determined values (e.g.,measurement performed using conventional techniques such as dissectiondata).

FIG. 8 is a simplified diagram of reference data according to anembodiment of the present invention. This diagram is merely an example,which should not unduly limit the scope of the claims. One of ordinaryskill in the art would recognize many variations, alternatives, andmodifications. A filling characteristic (e.g., the photoresist recesstime) is plotted against sizes of openings at 2 micrometer depth in agraph 800. During the process of determining various dimensions of theopenings, the graph 800 can be used. For example, a recess time of 70seconds corresponds to an approximately 0.145 micrometer opening size at2 micrometer depth according to graph 800. It is to be understood othertypes of reference data can be used to determine various characteristicsof the openings.

FIG. 9 is another simplified diagram of reference data according to anembodiment of the present invention. This diagram is merely an example,which should not unduly limit the scope of the claims. One of ordinaryskill in the art would recognize many variations, alternatives, andmodifications. A filling characteristic (e.g., the photoresist recesstime) is plotted against the capacitances of the openings in graph 900.It is to be that the present invention provides, among other things, amethod for measuring various characteristics such as capacitance at anearly stage of the manufacturing process. Typically, capacitance ofcertain integrated circuits is determined at a later stage of themanufacturing process.

It is to be appreciated that the present invention allows detailedcharacteristics of the openings to be obtained. FIG. 10 is a simplifieddiagram illustrating a utility used according to an embodiment of thepresent invention. This diagram is merely an example, which should notunduly limit the scope of the claims. One of ordinary skill in the artwould recognize many variations, alternatives, and modifications. Ascreen shot 1000 illustrates a computerized tool used to determinevarious characteristics of the openings based on a profile of thefilling material.

Now referring back to FIG. 4. At step 406, the filling material isremoved. According to an embodiment, the filling material is aphotoresist material and is partially removed at the step 406. Dependingupon application, the removal material is removed, remained, orpartially removed. One of the ordinary skills in the art wouldunderstand that the removal of filling material is compatible withexisting techniques.

FIG. 11 is a simply flow diagram illustrating an embodiment of thepresent invention. This diagram is merely an example, which should notunduly limit the scope of the claims. One of ordinary skill in the artwould recognize many variations, alternatives, and modifications. Forexample, various steps may be added, removed, moved, replaced, repeated,overlapped, and/or partially overlapped.

At step 1101, a substrate material is provided. For example, thesubstrate material includes pure silicon material that is used for themanufacturing of semiconductor wafer. The semiconductor can becharacterized by various dimensions. According to a specific embodiment,the substrate material is in a circular shape characterized by adiameter of twelve inches. The substrate material can have otherdimensions as well.

At step 1102, one or more openings are formed on the substrate material.Depending upon application, various techniques can be used to formopenings on the substrate material. According to a specific embodiment,etching process is performed to for opening. For example, plasma etchingis performed to form deep trenches on the substrate material. Accordingto another specific embodiment, openings are formed on the substratematerial by way of silicon growth.

At step 1103, a predetermined amount of polymer material is provided.According to a specific embodiment, the polymer material is a solidmaterial. For example, the polymer material is a photoresist material.Typically, a polymer material in solid form has a high viscosity valueand therefore does not fill into the openings.

At step 1104, the polymer material is processed. According to a specificexample, the polymer material is subject to a hard bake process and ismelted into a fluid form. For example, after the hard bake process, thepolymer material becomes a fluid polymer material.

Typically, the fluid polymer material has a lower viscosity value thanthe solid polymer material before melting. Due to low viscosity, thefluid polymer material fills into the openings. The fluid polymermaterial, after fillings into the openings, has a first portion that isfills into the openings and a second portion that is covering theopenings. Depending upon application, the fluid polymer material ishardened after being filled into the openings.

At step 1105, various filling characteristics of the polymer materialare determined. According to a specific embodiment, the amount ofpolymer material filled into the openings is determined. For example,since the total amount of polymer materials is known, the amount ofpolymer material filled into the openings is the total amount of polymermaterial less the amount polymer material covering (i.e., polymermaterials that did not filled into the openings) the openings. Accordingto another specific embodiment, the amount of time required to remove(or partially remove) the polymer material that overlays the openings isdetermined. For example, a long removal time indicates that there is alarge amount of polymer material lying on top of the openings, and asmall amount of polymer material is filled into the openings.

At step 1106, various characteristics of the openings are determined.According to an embodiment, the physical dimensions of the openings aredetermined based on the amount of polymers filled into the openings.According to another embodiment, physical dimensions of the openings aredetermined by comparing the newly determined filling characteristicswith predetermined reference data. It is to be appreciated that variousembodiments of the present invention allows other characteristics, suchas capacitance, of the openings to be determined as well.

Typically, after various characteristics of the openings are determined,the polymer material is removed. For example, an ashing process is usedto remove the polymer material. There can be other methods for removingthe polymer material as well.

In a specific embodiment, the present invention provides a method fordetermining one or more characteristics of a partially processedintegrated circuit. The method includes a step for providing a substratematerial. For example, the substrate material can be characterized by asubstrate thickness and a substrate diameter. The method furtherincludes a step for forming at least one opening (e.g., deep trench,etc) within the substrate material. The opening can be characterized byat least an opening characteristic. The opening characteristic includesa depth within a portion of the substrate thickness and an openingwidth. The depth and width are associated with an unknown volume. Themethod additionally includes a step for providing a predetermined amountof fill material. For example, a known amount of polymer material isprovided. Additionally, the method includes a step for processing thefill material to cause a first portion of the fill material to enter theopening (e.g., by melting the polymer material and causing it to flowinto the opening) and occupy an entirety of the unknown volumeassociated with the opening characteristic while a second portion of thefill material remains outside of the unknown volume associated with theopening characteristic. Moreover, the method includes a step forprocessing the second portion of the fill material using one or moreprocesses to determine a spatial characteristic associated with theunknown volume.

According to another embodiment, the present invention provides a methodfor manufacturing integrated circuits. The method includes a step forproviding a batch of semiconductor substrates for manufacturingintegrated circuits. The method also includes a step for forming one ormore openings on each of the substrates. For example, the one or moreopenings are formed by etching processes. Each of the openings can becharacterized by a depth and an aspect ratio. For example, the aspectfor a deep trench is typically more than 10:1. The method also includesa step for providing a filling material for each of the substrates. Thefilling material is consisted of a filling portion and a coveringportion. The filling portion is positioned within the one or moreopenings on each of the substrate, the covering portion overlaying theone or more openings on each of the substrate. The method additionallyincludes a step for determining a filling characteristic for each of thesubstrates. For example, the filling characteristic is associated with asize of the filling portion. The method additionally includes a step fordetermining an opening characteristic for each of the substrates basedon the filling characteristics. For example the opening characteristicis associated with the depth and aspect ratio. Additionally, the methodincludes a step for processing each of the substrates. It is to beappreciated that the present invention provides a way to determinevarious characteristics (such as depth, aspect ratio, size, etc.) of theopenings without damaging the substrates or structures thereof, each andevery wafer that is being processed can be monitored and tested.Additionally, the method includes a step for providing fully processedintegrated circuits based using each of the substrates.

Many benefits are achieved by way of the present invention overconventional techniques. For example, the present technique provides aneasy to use process that relies upon conventional technology. In someembodiments, the method provides a method for measuring variouscharacteristics of a partially processed IC without destroying the ICduring the process. For example, various dimensional and electricallyproperties of deep trenches can be measured for every wafer during themanufacturing process. According to various embodiments, the presentinvention reduces manufacturing costs, enhances reliability, andimproves consistency of ICs. Additionally, the method provides a processthat is compatible with conventional process technology withoutsubstantial modifications to conventional equipment and processes.Depending upon the embodiment, one or more of these benefits may beachieved. These and other benefits will be described in more throughoutthe present specification and more particularly below.

It is also understood that the examples and embodiments described hereinare for illustrative purposes only and that various modifications orchanges in light thereof will be suggested to persons skilled in the artand are to be included within the spirit and purview of this applicationand scope of the appended claims.

1. A method for determining one or more characteristics of a partiallyprocessed integrated circuit, the method comprising: providing asubstrate material, the substrate material being characterized by asubstrate thickness and a substrate diameter; forming at least oneopening within the substrate material, the opening being characterizedby at least an opening characteristic, the opening characteristic beinga depth within a portion of the substrate thickness and an openingwidth, the depth and width being associated with an unknown volume;providing a predetermined amount of fill material; processing the fillmaterial to cause a first portion of the fill material to enter theopening and occupy an entirety of the unknown volume associated with theopening characteristic while a second portion of the fill materialremains outside of the unknown volume associated with the openingcharacteristic; processing the second portion of the fill material usingone or more processes to determine a spatial characteristic associatedwith the unknown volume.
 2. The method of claim 1 wherein the formingthe opening comprises etching.
 3. The method of claim 1 wherein thepartially processed integrated circuit is use for produce capacitors. 4.The method of claim 1 wherein the forming the opening comprises deeptrenching.
 5. The method of claim 1 wherein the forming the openingcomprises growth of a first grow material.
 6. The method of claim 1wherein the fill material comprises a fluid material.
 7. The method ofclaim 1 wherein the fill material consisting of liquid material.
 8. Themethod of claim 1 wherein the fill materials comprises a polymermaterial.
 9. The method of claim 1 wherein the processing the secondportion of the fill material using comprises: determining a fillingcharacteristic associate with the second fill material; determining aspatial characteristic associated with the unknown volume based on thefilling characteristics.
 10. The method of claim 9 wherein the fillingcharacteristics comprise a volume displacement.
 11. The method of claim9 wherein the filling characteristics comprise a thickness of the secondportion.
 12. The method of claim 9 wherein the filling characteristicscomprise a recess time of the filling material.
 13. The method of claim9 wherein the filling characteristics comprise a ashing time of thefilling material.
 14. The method of claim 1 further comprising removingof the fill material.
 15. The method of claim 1 further comprisingpartially removing of the fill material.
 16. The method of claim 1wherein the opening characteristic comprises trench depths.
 17. Themethod of claim 1 wherein the opening characteristic comprises anopening size.
 18. The method of claim 1 wherein the openingcharacteristic comprises a capacitance.
 19. The method of claim 1wherein the opening characteristic comprises an aspect ratio.
 20. Themethod of claim 9 wherein the determining a spatial characteristiccomprises: providing a set of reference data; comparing the fillingcharacteristics with the reference data.
 21. The method of claim 1wherein the substrate comprises a plurality of films overlying asubstrate material.
 22. The method of claim 1 wherein the substratecomprises a silicon wafer including an overlying one or more films. 23.The method of claim 1 wherein the opening diameter and the opening depthinclude an aspect ratio (depth/diameter) of at least seven.
 24. Themethod of claim 21 wherein the opening diameter is about 90 nanometersand less.
 25. A method for determining one or more characteristics of apartially processed integrated circuit, the method comprising: providinga substrate material, the substrate material being characterized by afirst plurality of dimensions; forming one or more openings on thesubstrate material, the one or more opening being characterized by atleast an opening characteristic; providing a polymer material, thepolymer material overlaying the one or more openings, the polymermaterial being characterized by a predetermined amount; subjecting thepolymer material to a predetermined condition, wherein the polymermaterial becomes a fluid polymer material after being subjected to thepredetermined condition, the fluid polymer material consisting of afirst portion and a second portion, the first portion being positionedwithin the one or more openings, the second portion overlaying the oneor more openings; determining one or more filling characteristics of thefluid polymer material; and determining the opening characteristic, theopening characteristic being associated with the one or more fillingcharacteristics.
 26. The method of claim 25 wherein the openingcharacteristic comprises a trench depth.
 27. The method of claim 25wherein the opening characteristic is an aspect ratio.
 28. The method ofclaim 25 wherein the predetermined condition comprises a predeterminedtemperature.
 29. The method of claim 25 wherein the predeterminedcondition is associated with a hard bake process.
 30. The method ofclaim 25 wherein each of the openings is characterized by an aspectratio of at least 10:1.
 31. The method of claim 25 wherein the fillingone or more filling characteristic comprise a volume of the firstportion.
 32. The method of claim 25 wherein the filling one or morefilling characteristic comprise a thickness of the second portion. 33.The method of claim 25 wherein the filling one or more fillingcharacteristic comprise a profile of the second portion.
 34. The methodof claim 25 wherein the filling one or more filling characteristiccomprise a time required to remove a predetermined amount of the secondportion.
 35. The method of claim 25 wherein determining one or morefilling characteristics of the fluid polymer material comprises:removing a predetermined amount of the fluid polymer material;determining a time associated with removing the predetermined amount ofthe fluid polymer material.
 36. The method of claim 35 wherein removingthe second portion comprises an ashing process.
 37. The method of claim25 wherein the polymer material is characterized by a first viscosityvalue and the fluid polymer material is characterized by a secondviscosity value, the first viscosity value being less than the secondviscosity value.
 38. The method of claim 25 wherein the determining theopening characteristic comprises: providing a plurality of referencedata, the plurality of reference data being associated with a pluralityof predetermined opening characteristics and a plurality ofpredetermined filling characteristics; determining the openingcharacteristic based on the plurality of reference data.
 39. The methodof claim 25 further comprising removing a predetermined amount of fluidpolymer material.
 40. The method of claim 25 wherein the polymermaterial is a solid material.
 41. The method of claim 25 wherein thefluid polymer material is characterized by a flowing characteristic. 42.The method of claim 25 wherein the fluid polymer material is the polymermaterial in a liquid form after the polymer material is melted underhigh temperature.
 43. A method for manufacturing integrated circuitscomprising: providing a batch of semiconductor substrates formanufacturing integrated circuits; forming one or more openings on eachof the substrates, each of the openings being characterized by a depthand an aspect ratio; providing a filling material for each of thesubstrates, the filling material consisting of a filling portion and acovering portion, the filling portion positioned within the one or moreopenings on each of the substrate, the covering portion overlaying theone or more openings on each of the substrate; determining a fillingcharacteristic for each of the substrates, the filling characteristicbeing associated with a size of the filling portion; determining anopening characteristic for each of the substrates based on the fillingcharacteristics, the opening characteristic being associated with thedepth and aspect ratio; processing each of the substrates; and providingfully processed integrated circuits using each of the substrates. 44.The method of claim 43 wherein the fully processed integrated circuitscomprises capacitors.
 45. The method of claim 43 wherein the fullyprocessed integrated circuits comprises DRAMs.